Trichlorosilane
SiHCl3
L
9.8 psia
Dangerous when wet,
flammable liquid
Recommended
solution
2V-M-PEO Gas Panel
The 2V-M-PEO manual gas panel is designed for use with inert gases that have the properties of being an asphyxiant in high volume as well as being a high pressure compressed gas. The gas panel allows for venting of high pressure gas to allow for safe cylinder exchange and the consequential purging of the cylinder connection whilst maintaining the purity of the gas stream and protecting the pressure regulator for any particle contamination. An air operated Regulator Inlet Valve, with a manual override fitted to the gas panel for purging purposes, enhances the gas panel to allow for shutdown in the event of an emergency. A 0.4 micron pre-filter is fitted as standard along with a 10 bar burst disc for over pressure protection on the outlet side. Further optional enhancements can be found on the datasheet.
Minimum
solution
2V-M Gas Panel
The 2V-M manual gas panel is designed for use with inert gases that have the properties of being an asphyxiant in high volume as well as being a high pressure compressed gas. The gas panel allows for venting of high pressure gas to allow for safe cylinder exchange and the consequential purging of the cylinder connection whilst maintaining the purity of the gas stream and protecting the pressure regulator for any particle contamination. A 0.4 micron pre-filter is fitted as standard along with a 10 bar burst disc for over pressure protection on the outlet side. Further optional enhancements can be found on the datasheet.